Install right after the PECVD or before the metallization process
Chroma 7214-D is the inspector for Anti-reflection coating process. With 4M mono CCD and Chroma’s experience RGB illumination design, we could assure that each defined defectives could be identified through our specified combination.
The 7214-D anti-reflection inspector could be applied in discovering:
Stripe shape watermark
With our flexible and hierarchy software design, customer could set up the criteria to inspect their unique defect that is generated because of different PECVD machines.