Anti-reflection Coating Inspector Model 7214-D

Key Features

  • Anti-reflection Coating Inspector
  • Defects and color variance detection
  • Install right after the PECVD or before the metallization process


Chroma 7214-D is the inspector for Anti-reflection coating process. With 4M mono CCD and Chroma’s experience RGB illumination design, we could assure that each defined defectives could be identified through our specified combination.

The 7214-D anti-reflection inspector could be applied in discovering:

  • Color difference
  • Brownish stains
  • Stripe shape watermark
  • Particles
  • Belt mark
  • Acid mark
  • Stacking cells
  • Chipping

With our flexible and hierarchy software design, customer could set up the criteria to inspect their unique defect that is generated because of different PECVD machines.

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